Inventor
FOLEY MICHAEL S
US8 patents
⚠️ This page may combine multiple inventors who share the name “FOLEY MICHAEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
3 patentsUS4528451AJul 9, 1985
Gap control system for localized vacuum processing
VARIAN ASSOCIATES64 citations93
US4560880ADec 24, 1985
Apparatus for positioning a workpiece in a localized vacuum processing system
VARIAN ASSOCIATES49 citations89
US4524261AJun 18, 1985
Localized vacuum processing apparatus
VARIAN ASSOCIATES15 citations73