Inventor
ITO SHIN ICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ITO SHIN ICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS5627626AMay 6, 1997
Projectin exposure apparatus
TOSHIBA KK102 citations99
US5621498AApr 15, 1997
Projection exposure apparatus
TOSHIBA KK101 citations99
US5707501AJan 13, 1998
Filter manufacturing apparatus
TOSHIBA KK81 citations96
US5631109AMay 20, 1997
Exposure mask comprising transparent and translucent phase shift patterns
TOSHIBA KK24 citations92
US5536604AJul 16, 1996
Exposure mask
TOSHIBA KK27 citations92
US5409789AApr 25, 1995
Exposure mask comprising translucent and transparent phase shifters
TOSHIBA KK29 citations92