Inventor
HWANG YOUNG-HO
KR5 patents
⚠️ This page may combine multiple inventors who share the name “HWANG YOUNG-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS10627206B2Apr 21, 2020
Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations46
US12568790B2Mar 3, 2026
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations44
US9843284B2Dec 12, 2017
System for controlling fault tolerance
SAMSUNG ELECTRONICS CO LTD0 citations38