Inventor
MIZOSAKI KENGO
JP8 patents
Patents
8 patentsUS6087632AJul 11, 2000
Heat processing device with hot plate and associated reflector
TOKYO ELECTRON LTD64 citations95
US5518552AMay 21, 1996
Method for scrubbing and cleaning substrate
TOKYO ELECTRON LTD54 citations95
US5345639ASep 13, 1994
Device and method for scrubbing and cleaning substrate
TOKYO ELECTRON LTD67 citations95
US6451515B2Sep 17, 2002
Substrate treating method
TOKYO ELECTRON LTD31 citations92
US6443641B2Sep 3, 2002
Substrate process method and substrate process apparatus
TOKYO ELECTRON LTD28 citations92
US6261007B1Jul 17, 2001
Substrate process method and substrate process apparatus
TOKYO ELECTRON LTD43 citations92
US5998766ADec 7, 1999
Apparatus and method for cleaning substrate surface by use of Ozone
TOKYO ELECTRON LTD27 citations92
US5695562ADec 9, 1997
Processing apparatus
TOKYO ELECTRON LTD14 citations72