Inventor
KOHNO MAKIKO
JP7 patents
Patents
7 patentsUS5233191AAug 3, 1993
Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process
HITACHI LTD145 citations98
US5333495AAug 2, 1994
Method and apparatus for processing a minute portion of a specimen
HITACHI LTD76 citations96
US5214282AMay 25, 1993
Method and apparatus for processing a minute portion of a specimen
HITACHI LTD58 citations96
US5746826AMay 5, 1998
Method and apparatus for forming microstructure body
HITACHI LTD20 citations92
US5585722ADec 17, 1996
Apparatus for measuring physical properties of micro area
HITACHI LTD36 citations92
US5698798ADec 16, 1997
Method and apparatus for dynamic observation of specimen
HITACHI LTD3 citations62
US5218335AJun 8, 1993
Electronic circuit device having thin film resistor and method for producing the same
HITACHI LTD6 citations62