Inventor
MOTOYAMA TAKUSHI
JP8 patents
Patents
8 patentsUS6099992AAug 8, 2000
Method for designing reticle, reticle, and method for manufacturing semiconductor device
FUJITSU LTD49 citations94
US5621246AApr 15, 1997
Substrate for mounting integrated circuit semiconductor chips
FUJITSU LTD25 citations91
US5403438AApr 4, 1995
Process for forming pattern
FUJITSU LTD26 citations91
US5194364AMar 16, 1993
Process for formation of resist patterns
FUJITSU LTD20 citations81
US4983543AJan 8, 1991
Method of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuit
FUJITSU LTD8 citations73
US5160404ANov 3, 1992
Method of removing a patterned multilevel resist from a surface layer on a substrate
FUJITSU LTD14 citations72
US6553274B1Apr 22, 2003
Method for designing reticle, reticle, and method for manufacturing semiconductor device
FUJITSU LTD11 citations71
US5030316AJul 9, 1991
Trench etching process
FUJITSU LTD6 citations61