Inventor

SUNG SHING-LI

TW3 patents

⚠️ This page may combine multiple inventors who share the name “SUNG SHING-LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7432210B2Oct 7, 2008

Process to open carbon based hardmask

APPLIED MATERIALS INC9 citations82

US7510976B2Mar 31, 2009

Dielectric plasma etch process with in-situ amorphous carbon mask with improved critical dimension and etch selectivity

APPLIED MATERIALS INC6 citations61

(unassigned)

1 patent

US6346303B1Feb 12, 2002

Process for synthesizing one-dimensional nanosubstances by electron cyclotron resonance chemical vapor deposition

35 citations87