Inventor
WANG LIANG-GUO
US14 patents
⚠️ This page may combine multiple inventors who share the name “WANG LIANG-GUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6481886B1Nov 19, 2002
Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system
APPLIED MATERIALS INC92 citations98
US6478924B1Nov 12, 2002
Plasma chamber support having dual electrodes
APPLIED MATERIALS INC124 citations97
US6094334AJul 25, 2000
Polymer chuck with heater and method of manufacture
APPLIED MATERIALS INC97 citations97
US6151203ANov 21, 2000
Connectors for an electrostatic chuck and combination thereof
APPLIED MATERIALS INC76 citations95
US6494958B1Dec 17, 2002
Plasma chamber support with coupled electrode
APPLIED MATERIALS INC74 citations94
US6667527B2Dec 23, 2003
Temperature sensor with shell
APPLIED MATERIALS INC17 citations84
US6642489B2Nov 4, 2003
Method and apparatus for improving exhaust gas consumption in an exhaust conduit
APPLIED MATERIALS INC2 citations62