Inventor
WONG KWOK MANUS
US11 patents
⚠️ This page may combine multiple inventors who share the name “WONG KWOK MANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6478924B1Nov 12, 2002
Plasma chamber support having dual electrodes
APPLIED MATERIALS INC124 citations97
US6367412B1Apr 9, 2002
Porous ceramic liner for a plasma source
APPLIED MATERIALS INC135 citations97
US6391146B1May 21, 2002
Erosion resistant gas energizer
APPLIED MATERIALS INC73 citations96
US7221553B2May 22, 2007
Substrate support having heat transfer system
APPLIED MATERIALS INC49 citations95
US6494958B1Dec 17, 2002
Plasma chamber support with coupled electrode
APPLIED MATERIALS INC74 citations94
US6673323B1Jan 6, 2004
Treatment of hazardous gases in effluent
APPLIED MATERIALS INC47 citations92
US7768765B2Aug 3, 2010
Substrate support having heat transfer system
APPLIED MATERIALS INC8 citations83
US6824748B2Nov 30, 2004
Heated catalytic treatment of an effluent gas from a substrate fabrication process
APPLIED MATERIALS INC18 citations83
US6642489B2Nov 4, 2003
Method and apparatus for improving exhaust gas consumption in an exhaust conduit
APPLIED MATERIALS INC2 citations62