Inventor
MAKHRATCHEV KONSTANTIN
US29 patents
⚠️ This page may combine multiple inventors who share the name “MAKHRATCHEV KONSTANTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS8941969B2Jan 27, 2015
Single-body electrostatic chuck
APPLIED MATERIALS INC44 citations94
US10460916B2Oct 29, 2019
Real time monitoring with closed loop chucking force control
APPLIED MATERIALS INC45 citations93
US10079165B2Sep 18, 2018
Electrostatic chuck with independent zone cooling and reduced crosstalk
APPLIED MATERIALS INC6 citations84
US9666466B2May 30, 2017
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC10 citations83
US12334385B2Jun 17, 2025
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC1 citations75
US11158526B2Oct 26, 2021
Temperature controlled substrate support assembly
APPLIED MATERIALS INC2 citations73
US10403534B2Sep 3, 2019
Pixilated cooling, temperature controlled substrate support assembly
APPLIED MATERIALS INC3 citations72
US9558981B2Jan 31, 2017
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC4 citations72
US9948214B2Apr 17, 2018
High temperature electrostatic chuck with real-time heat zone regulating capability
APPLIED MATERIALS INC2 citations71
US9472435B2Oct 18, 2016
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC2 citations63
US12243756B2Mar 4, 2025
Temperature controlled substrate support assembly
APPLIED MATERIALS INC0 citations62
US12009244B2Jun 11, 2024
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC0 citations62
US9991148B2Jun 5, 2018
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC1 citations62
US11088005B2Aug 10, 2021
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC0 citations59
US10622229B2Apr 14, 2020
Electrostatic chuck with independent zone cooling and reduced crosstalk
APPLIED MATERIALS INC0 citations52
US10535544B2Jan 14, 2020
Tunable temperature controlled substrate support assembly
APPLIED MATERIALS INC0 citations52
US10026636B2Jul 17, 2018
Electrostatic chuck having reduced power loss
APPLIED MATERIALS INC1 citations52
US10121688B2Nov 6, 2018
Electrostatic chuck with external flow adjustments for improved temperature distribution
APPLIED MATERIALS INC1 citations51
US9875923B2Jan 23, 2018
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC0 citations51
US10304715B2May 28, 2019
Electrostatic chuck having thermally isolated zones with minimal crosstalk
APPLIED MATERIALS INC0 citations50