Inventor
JAN CHIN-TSAN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “JAN CHIN-TSAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7139641B2Nov 21, 2006
Wafer protection system
TAIWAN SEMICONDUCTOR MFG7 citations70
US6998013B2Feb 14, 2006
CMP apparatus polishing head with concentric pressure zones
TAIWAN SEMICONDUCTOR MFG9 citations70
US6516675B1Feb 11, 2003
Bubble ultrasonic flow meter
TAIWAN SEMICONDUCTOR MFG11 citations69
US6758724B2Jul 6, 2004
Online tension monitor system for robot x-belt of mirra CMP
TAIWAN SEMICONDUCTOR MFG0 citations48