Inventor
MATSUO TAKENOBU
JP21 patents
Patents
21 patentsUS5718763AFeb 17, 1998
Resist processing apparatus for a rectangular substrate
TOKYO ELECTRON LTD154 citations99
US5439026AAug 8, 1995
Processing apparatus and flow control arrangement therefor
TOKYO ELECTRON LTD81 citations95
US6756565B2Jun 29, 2004
Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator
TOKYO ELECTRON LTD24 citations92
US5445521AAug 29, 1995
Heat treating method and device
TOKYO ELECTRON LTD21 citations92
US5441076AAug 15, 1995
Processing apparatus using gas
TOKYO ELECTRON LTD51 citations92
US5359148AOct 25, 1994
Heat-treating apparatus
TOKYO ELECTRON LTD36 citations92
US5307568AMay 3, 1994
Gas supply system
TOKYO ELECTRON LTD51 citations92
US5514196AMay 7, 1996
Air cleaning apparatus
TOKYO ELECTRON LTD29 citations91
US5853803ADec 29, 1998
Resist processing method and apparatus
TOKYO ELECTRON LTD12 citations74
US6949719B2Sep 27, 2005
Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator
TOKYO ELECTRON LTD10 citations73
US5421365AJun 6, 1995
Flow control apparatus
TOKYO ELECTRON LTD15 citations73
US5294280AMar 15, 1994
Gas measuring device and processing apparatus provided with the gas measuring device
TOKYO ELECTRON LTD9 citations72
US7112268B2Sep 26, 2006
Plating device and plating method
TOKYO ELECTRON LTD3 citations63
US6716329B2Apr 6, 2004
Processing apparatus and processing system
TOKYO ELECTRON LTD6 citations63
US6403498B1Jun 11, 2002
Method and device for treating substrate
TOKYO ELECTRON LTD4 citations62
US6337365B1Jan 8, 2002
Electronic/electric components used in clean room and substrate treatment apparatus
TOKYO ELECTRON LTD5 citations62
US6077894AJun 20, 2000
Instrument and mounting equipment used in clean room
TOKYO ELECTRON LTD2 citations62
US6634370B2Oct 21, 2003
Liquid treatment system and liquid treatment method
TOKYO ELECTRON LTD6 citations60
US6740164B2May 25, 2004
Plating apparatus and method of manufacturing semiconductor device
TOKYO ELECTRON LTD1 citations52
US6641709B2Nov 4, 2003
Mist trap mechanism and method for plating apparatus
TOKYO ELECTRON LTD0 citations51
US6953522B2Oct 11, 2005
Liquid treatment method using alternating electrical contacts
TOKYO ELECTRON LTD0 citations41