Inventor

SHIGETOMI KENICHI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “SHIGETOMI KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US7049553B2May 23, 2006

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD12 citations83

US8378272B2Feb 19, 2013

Heat treatment apparatus, heat treatment method and storage medium

TOKYO ELECTRON LTD7 citations80

US11476136B2Oct 18, 2022

Substrate processing apparatus and method of adjusting substrate processing apparatus

TOKYO ELECTRON LTD0 citations57

US10886151B2Jan 5, 2021

Heating apparatus and substrate processing apparatus

TOKYO ELECTRON LTD1 citations55

US10504757B2Dec 10, 2019

Substrate processing apparatus and method of adjusting substrate processing apparatus

TOKYO ELECTRON LTD0 citations47

OHUMI TSUSHO KABUSHIKI KAISHA

1 patent

US5176552AJan 5, 1993

Luminous float

OHUMI TSUSHO KABUSHIKI KAISHA65 citations87

FUKUDA YOSHITERU

1 patent

US8138456B2Mar 20, 2012

Heat processing method, computer-readable storage medium, and heat processing apparatus

FUKUDA YOSHITERU24 citations86

SHIGETOMI KENICHI

1 patent

US8916804B2Dec 23, 2014

Heat treatment method, recording medium having recorded program for executing heat treatment method, and heat treatment apparatus

SHIGETOMI KENICHI7 citations77