P

Inventor

SEKIGUCHI ATSUSHI

JP41 patents
⚠️ This page may combine multiple inventors who share the name “SEKIGUCHI ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

19 patents
US5891349AApr 6, 1999

Plasma enhanced CVD apparatus and process, and dry etching apparatus and process

ANELVA CORP308 citations98
US5855685AJan 5, 1999

Plasma enhanced CVD apparatus, plasma enhanced processing apparatus and plasma enhanced CVD method

ANELVA CORP220 citations98
US6080446AJun 27, 2000

Method of depositing titanium nitride thin film and CVD deposition apparatus

ANELVA CORP106 citations96
US5721021AFeb 24, 1998

Method of depositing titanium-containing conductive thin film

ANELVA CORP62 citations95
US5744377AApr 28, 1998

Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means

ANELVA CORP25 citations93
US5594280AJan 14, 1997

Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means

ANELVA CORP38 citations93
US6471781B1Oct 29, 2002

Method of depositing titanium nitride thin film and CVD deposition apparatus

ANELVA CORP21 citations91
US5672385ASep 30, 1997

Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas

ANELVA CORP33 citations91
US4919783AApr 24, 1990

Apparatus for processing an object by gas plasma with a reduced damage

ANELVA CORP30 citations90
US4664747AMay 12, 1987

Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same

ANELVA CORP45 citations90
US5993679ANov 30, 1999

Method of cleaning metallic films built up within thin film deposition apparatus

ANELVA CORP48 citations89
US4963423AOct 16, 1990

Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means

ANELVA CORP15 citations82
US4981103AJan 1, 1991

Apparatus for forming a metal thin film utilizing temperature controlling means

ANELVA CORP16 citations74
US6468604B1Oct 22, 2002

Method for manufacturing a titanium nitride thin film

ANELVA CORP10 citations73
US6562219B2May 13, 2003

Method for the formation of copper wiring films

ANELVA CORP7 citations72
US5376628ADec 27, 1994

Method of improving or producing oxide superconductor

ANELVA CORP10 citations71
US6726954B2Apr 27, 2004

Method and system for forming copper thin film

ANELVA CORP6 citations63
US6387444B1May 14, 2002

Single substrate processing CVD procedure for depositing a metal film using first and second CVD processes in first and second process chambers

ANELVA CORP2 citations63
US6887522B2May 3, 2005

Method for forming a copper thin film

ANELVA CORP2 citations61

DAINIPPON PRINTING CO LTD

11 patents
US7618750B2Nov 17, 2009

Hologram recording sheet, holographic optical element using said sheet, and its production process

DAINIPPON PRINTING CO LTD101 citations99
US7579119B2Aug 25, 2009

Hologram recording sheet, holographic optical element using said sheet, and its production process

DAINIPPON PRINTING CO LTD105 citations99
US7479354B2Jan 20, 2009

Hologram recording sheet, holographic optical element using said sheet, and its production process

DAINIPPON PRINTING CO LTD104 citations99
US7132200B1Nov 7, 2006

Hologram recording sheet, holographic optical element using said sheet, and its production process

DAINIPPON PRINTING CO LTD118 citations99
US6340540B1Jan 22, 2002

Hologram recording sheet holographic optical element using said sheet and its production process

DAINIPPON PRINTING CO LTD114 citations99
US6127066AOct 3, 2000

Hologram recording sheet, holographic optical element using said sheet, and its production process

DAINIPPON PRINTING CO LTD175 citations99
US5453338ASep 26, 1995

Hologram and method of and apparatus for producing the same

DAINIPPON PRINTING CO LTD69 citations96
US5985490ANov 16, 1999

Hologram and method of and apparatus for producing the same

DAINIPPON PRINTING CO LTD12 citations82
US7727680B2Jun 1, 2010

Hologram recording sheet, holographic optical element using said sheet, and its production process

DAINIPPON PRINTING CO LTD3 citations74
US6291109B1Sep 18, 2001

Hologram and method of and apparatus for producing the same

DAINIPPON PRINTING CO LTD7 citations74
US5660954AAug 26, 1997

Hologram and method of and apparatus for producing the same

DAINIPPON PRINTING CO LTD8 citations74

HONDA MOTOR CO LTD

4 patents

HITACHI HIGH TECH CORP

2 patents

SONY CORP

1 patent

JAPAN RES DEV CORP

1 patent

KONISHIROKU PHOTO IND

1 patent

CANON ANELVA CORP

1 patent

MATSUHASHI RYO

1 patent