Inventor
SEKIGUCHI ATSUSHI
JP41 patents
⚠️ This page may combine multiple inventors who share the name “SEKIGUCHI ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
19 patentsUS5891349AApr 6, 1999
Plasma enhanced CVD apparatus and process, and dry etching apparatus and process
ANELVA CORP308 citations98
US5855685AJan 5, 1999
Plasma enhanced CVD apparatus, plasma enhanced processing apparatus and plasma enhanced CVD method
ANELVA CORP220 citations98
US6080446AJun 27, 2000
Method of depositing titanium nitride thin film and CVD deposition apparatus
ANELVA CORP106 citations96
US5721021AFeb 24, 1998
Method of depositing titanium-containing conductive thin film
ANELVA CORP62 citations95
US5744377AApr 28, 1998
Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means
ANELVA CORP25 citations93
US5594280AJan 14, 1997
Method of forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means
ANELVA CORP38 citations93
US6471781B1Oct 29, 2002
Method of depositing titanium nitride thin film and CVD deposition apparatus
ANELVA CORP21 citations91
US5672385ASep 30, 1997
Titanium nitride film-MOCVD method incorporating use of tetrakisdialkylaminotitanium as a source gas
ANELVA CORP33 citations91
US4919783AApr 24, 1990
Apparatus for processing an object by gas plasma with a reduced damage
ANELVA CORP30 citations90
US4664747AMay 12, 1987
Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same
ANELVA CORP45 citations90
US5993679ANov 30, 1999
Method of cleaning metallic films built up within thin film deposition apparatus
ANELVA CORP48 citations89
US4963423AOct 16, 1990
Method for forming a thin film and apparatus of forming a metal thin film utilizing temperature controlling means
ANELVA CORP15 citations82
US4981103AJan 1, 1991
Apparatus for forming a metal thin film utilizing temperature controlling means
ANELVA CORP16 citations74
US6468604B1Oct 22, 2002
Method for manufacturing a titanium nitride thin film
ANELVA CORP10 citations73
US6562219B2May 13, 2003
Method for the formation of copper wiring films
ANELVA CORP7 citations72
US5376628ADec 27, 1994
Method of improving or producing oxide superconductor
ANELVA CORP10 citations71
US6726954B2Apr 27, 2004
Method and system for forming copper thin film
ANELVA CORP6 citations63
US6387444B1May 14, 2002
Single substrate processing CVD procedure for depositing a metal film using first and second CVD processes in first and second process chambers
ANELVA CORP2 citations63
US6887522B2May 3, 2005
Method for forming a copper thin film
ANELVA CORP2 citations61
DAINIPPON PRINTING CO LTD
11 patentsUS7618750B2Nov 17, 2009
Hologram recording sheet, holographic optical element using said sheet, and its production process
DAINIPPON PRINTING CO LTD101 citations99
US7579119B2Aug 25, 2009
Hologram recording sheet, holographic optical element using said sheet, and its production process
DAINIPPON PRINTING CO LTD105 citations99
US7479354B2Jan 20, 2009
Hologram recording sheet, holographic optical element using said sheet, and its production process
DAINIPPON PRINTING CO LTD104 citations99
US7132200B1Nov 7, 2006
Hologram recording sheet, holographic optical element using said sheet, and its production process
DAINIPPON PRINTING CO LTD118 citations99
US6340540B1Jan 22, 2002
Hologram recording sheet holographic optical element using said sheet and its production process
DAINIPPON PRINTING CO LTD114 citations99
US6127066AOct 3, 2000
Hologram recording sheet, holographic optical element using said sheet, and its production process
DAINIPPON PRINTING CO LTD175 citations99
US5453338ASep 26, 1995
Hologram and method of and apparatus for producing the same
DAINIPPON PRINTING CO LTD69 citations96
US5985490ANov 16, 1999
Hologram and method of and apparatus for producing the same
DAINIPPON PRINTING CO LTD12 citations82
US7727680B2Jun 1, 2010
Hologram recording sheet, holographic optical element using said sheet, and its production process
DAINIPPON PRINTING CO LTD3 citations74
US6291109B1Sep 18, 2001
Hologram and method of and apparatus for producing the same
DAINIPPON PRINTING CO LTD7 citations74
US5660954AAug 26, 1997
Hologram and method of and apparatus for producing the same
DAINIPPON PRINTING CO LTD8 citations74
HONDA MOTOR CO LTD
4 patentsUS11176948B2Nov 16, 2021
Agent device, agent presentation method, and storage medium
HONDA MOTOR CO LTD0 citations62
US11014508B2May 25, 2021
Communication support system, communication support method, and storage medium
HONDA MOTOR CO LTD0 citations52
US10994612B2May 4, 2021
Agent system, agent control method, and storage medium
HONDA MOTOR CO LTD0 citations52
US11798552B2Oct 24, 2023
Agent device, agent control method, and program
HONDA MOTOR CO LTD0 citations51