P

Inventor

ODAGIRI MASAYA

US6 patents
⚠️ This page may combine multiple inventors who share the name “ODAGIRI MASAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ODAGIRI MASAYA

3 patents
US8741065B2Jun 3, 2014

Substrate processing apparatus

ODAGIRI MASAYA343 citations94
US8968475B2Mar 3, 2015

Substrate processing apparatus

ODAGIRI MASAYA2 citations58
US9153465B2Oct 6, 2015

Substrate stage, substrate processing apparatus and substrate processing system

ODAGIRI MASAYA0 citations37

TOKYO ELECTRON LTD

1 patent
US7877161B2Jan 25, 2011

Method and system for performing a chemical oxide removal process

TOKYO ELECTRON LTD13 citations80

TOMOYASU MASAYUKI

1 patent
US8175736B2May 8, 2012

Method and system for performing a chemical oxide removal process

TOMOYASU MASAYUKI3 citations53

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD

1 patent
US12191114B2Jan 7, 2025

Semiconductor reaction chamber and atomic layer plasma etching apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations49