Inventor
IWAMI AKIRA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IWAMI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7877161B2Jan 25, 2011
Method and system for performing a chemical oxide removal process
TOKYO ELECTRON LTD13 citations80
US6954716B2Oct 11, 2005
Method of automatically resetting processing apparatus
TOKYO ELECTRON LTD8 citations71
US7555406B2Jun 30, 2009
Method of maintaining and automatically inspecting processing apparatus
TOKYO ELECTRON LTD0 citations50