Inventor
WANG XINMING
CN24 patents
⚠️ This page may combine multiple inventors who share the name “WANG XINMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
12 patentsUS7285492B2Oct 23, 2007
Method for processing substrate
EBARA CORP21 citations92
US7060618B2Jun 13, 2006
Semiconductor device, method for manufacturing the same, and plating solution
EBARA CORP24 citations91
US7172979B2Feb 6, 2007
Substrate processing apparatus and method
EBARA CORP15 citations84
US7141274B2Nov 28, 2006
Substrate processing apparatus and method
EBARA CORP16 citations84
US7279408B2Oct 9, 2007
Semiconductor device, method for manufacturing the same, and plating solution
EBARA CORP13 citations83
US7217653B2May 15, 2007
Interconnects forming method and interconnects forming apparatus
EBARA CORP10 citations83
US7332198B2Feb 19, 2008
Plating apparatus and plating method
EBARA CORP5 citations63
US7498261B2Mar 3, 2009
Method and apparatus for forming metal film
EBARA CORP3 citations62
US7407821B2Aug 5, 2008
Substrate processing method
EBARA CORP4 citations62
US7374584B2May 20, 2008
Interconnects forming method and interconnects forming apparatus
EBARA CORP2 citations62
US7344986B2Mar 18, 2008
Plating solution, semiconductor device and method for manufacturing the same
EBARA CORP5 citations61
US7297210B2Nov 20, 2007
Plating apparatus
EBARA CORP1 citations52
EVONIK DEGUSSA GMBH
5 patentsUS9840473B1Dec 12, 2017
Method of preparing a high purity imidazolium salt
EVONIK DEGUSSA GMBH8 citations83
US10138209B2Nov 27, 2018
Process for purifying an ionic liquid
EVONIK DEGUSSA GMBH4 citations68
US10512881B2Dec 24, 2019
Process for dehumidifying moist gas mixtures
EVONIK DEGUSSA GMBH1 citations61
US10512883B2Dec 24, 2019
Process for dehumidifying moist gas mixtures
EVONIK DEGUSSA GMBH1 citations61
US10500540B2Dec 10, 2019
Method for dehumidifying humid gas mixtures using ionic liquids
EVONIK DEGUSSA GMBH1 citations60