Inventor
MIEHER WALTER DEAN
US14 patents
⚠️ This page may combine multiple inventors who share the name “MIEHER WALTER DEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS7068833B1Jun 27, 2006
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP81 citations99
US7177457B2Feb 13, 2007
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP33 citations96
US7274814B2Sep 25, 2007
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP18 citations93
US7175945B2Feb 13, 2007
Focus masking structures, focus patterns and measurements thereof
KLA TENCOR CORP37 citations92
US8040511B1Oct 18, 2011
Azimuth angle measurement
KLA TENCOR CORP37 citations90
US10401740B2Sep 3, 2019
System and method for focus determination using focus-sensitive overlay targets
KLA TENCOR CORP1 citations62
KLA TENCOR TECH CORP
5 patentsUS6985618B2Jan 10, 2006
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP98 citations99
US6486954B1Nov 26, 2002
Overlay alignment measurement mark
KLA TENCOR TECH CORP199 citations99
US7181057B2Feb 20, 2007
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP40 citations96
US7317824B2Jan 8, 2008
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR TECH CORP22 citations93
US6884552B2Apr 26, 2005
Focus masking structures, focus patterns and measurements thereof
KLA TENCOR TECH CORP29 citations92