Inventor
TSUNG JAMES
US24 patents
⚠️ This page may combine multiple inventors who share the name “TSUNG JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENDO RICK
9 patentsUS8770143B2Jul 8, 2014
Multi-region processing system
ENDO RICK19 citations92
US8932995B2Jan 13, 2015
Combinatorial process system
ENDO RICK1 citations62
US8771483B2Jul 8, 2014
Combinatorial process system
ENDO RICK2 citations62
US8449678B2May 28, 2013
Combinatorial process system
ENDO RICK2 citations62
US8387563B2Mar 5, 2013
Combinatorial process system
ENDO RICK1 citations62
US8317925B2Nov 27, 2012
Method and system for mask handling in high productivity chamber
ENDO RICK2 citations61
US8486821B1Jul 16, 2013
Method and apparatus for variable conductance
ENDO RICK2 citations60
US8216376B1Jul 10, 2012
Method and apparatus for variable conductance
ENDO RICK3 citations60
US8758581B2Jun 24, 2014
Combinatorial process system
ENDO RICK0 citations51
INTERMOLECULAR INC
7 patentsUS7993461B2Aug 9, 2011
Method and system for mask handling in high productivity chamber
INTERMOLECULAR INC8 citations83
US7867904B2Jan 11, 2011
Method and system for isolated and discretized process sequence integration
INTERMOLECULAR INC8 citations82
US8039052B2Oct 18, 2011
Multi-region processing system and heads
INTERMOLECULAR INC5 citations73
US9269567B2Feb 23, 2016
High productivity combinatorial processing using pressure-controlled one-way valves
INTERMOLECULAR INC2 citations60
US8500908B2Aug 6, 2013
Method and system for mask handling in high productivity chamber
INTERMOLECULAR INC0 citations51
US9318306B2Apr 19, 2016
Interchangeable sputter gun head
INTERMOLECULAR INC0 citations42
US9087864B2Jul 21, 2015
Multipurpose combinatorial vapor phase deposition chamber
INTERMOLECULAR INC0 citations39
APPLIED MATERIALS INC
4 patentsUS6841050B2Jan 11, 2005
Small planetary magnetron
APPLIED MATERIALS INC36 citations91
US7169271B2Jan 30, 2007
Magnetron executing planetary motion adjacent a sputtering target
APPLIED MATERIALS INC11 citations82
US6797131B2Sep 28, 2004
Design of hardware features to facilitate arc-spray coating applications and functions
APPLIED MATERIALS INC11 citations69
US7807030B2Oct 5, 2010
Small scanned magentron
APPLIED MATERIALS INC4 citations61