Inventor
LIM KHOON PENG
SG8 patents
⚠️ This page may combine multiple inventors who share the name “LIM KHOON PENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TECH SEMICONDUCTOR SINGAPORE
3 patentsUS7163435B2Jan 16, 2007
Real time monitoring of CMP pad conditioning process
TECH SEMICONDUCTOR SINGAPORE19 citations85
US7248975B2Jul 24, 2007
Real time monitoring of particulate contamination in a wafer processing chamber
TECH SEMICONDUCTOR SINGAPORE7 citations65
US7750819B2Jul 6, 2010
Real-time detection of wafer shift/slide in a chamber
TECH SEMICONDUCTOR SINGAPORE5 citations60
VESTAS WIND SYS AS
3 patentsUS7945351B2May 17, 2011
Method for controlling the operation of a wind turbine based on deviation between operating and predetermined frequency response functions
VESTAS WIND SYS AS8 citations81
US8355823B2Jan 15, 2013
Method and system for controlling operation of a wind turbine
VESTAS WIND SYS AS12 citations79
US9964098B2May 8, 2018
Method of controlling a wind turbine, and a wind turbine
VESTAS WIND SYS AS4 citations66