Inventor
KOAKUTSU MASATO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KOAKUTSU MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS9748104B2Aug 29, 2017
Method of depositing film
TOKYO ELECTRON LTD280 citations97
US9136133B2Sep 15, 2015
Method of depositing film
TOKYO ELECTRON LTD12 citations82
US8987147B2Mar 24, 2015
Method of depositing a film using a turntable apparatus
TOKYO ELECTRON LTD3 citations61
US11702739B2Jul 18, 2023
Film deposition method and film deposition apparatus
TOKYO ELECTRON LTD0 citations51
US10975466B2Apr 13, 2021
Method of cleaning exhaust pipe
TOKYO ELECTRON LTD0 citations50
US8921237B2Dec 30, 2014
Method of depositing a film
TOKYO ELECTRON LTD0 citations50
US11075076B2Jul 27, 2021
Method for manufacturing a semiconductor device and film deposition apparatus
TOKYO ELECTRON LTD0 citations49
US10961623B2Mar 30, 2021
Film forming method
TOKYO ELECTRON LTD0 citations49