Inventor
BUURMAN ERIK PETRUS
NL15 patents
⚠️ This page may combine multiple inventors who share the name “BUURMAN ERIK PETRUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7525638B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations81
US7817247B2Oct 19, 2010
Lithographic apparatus, excimer laser and device manufacturing method
ASML NETHERLANDS BV5 citations71
US7655367B2Feb 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US7595863B2Sep 29, 2009
Lithographic apparatus, excimer laser and device manufacturing method
ASML NETHERLANDS BV5 citations69
US7453551B2Nov 18, 2008
Increasing pulse-to-pulse radiation beam uniformity
ASML NETHERLANDS BV2 citations61
US7868999B2Jan 11, 2011
Lithographic apparatus, source, source controller and control method
ASML NETHERLANDS BV3 citations59
US10222702B2Mar 5, 2019
Radiation source
ASML NETHERLANDS BV1 citations58
US7491478B2Feb 17, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
LOOPSTRA ERIK ROELOF
3 patentsUS9110377B2Aug 18, 2015
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF5 citations71
US8431916B2Apr 30, 2013
Radiation source and lithographic apparatus
LOOPSTRA ERIK ROELOF3 citations62
US8462826B2Jun 11, 2013
Laser device
LOOPSTRA ERIK ROELOF0 citations51