Inventor
NIWA TAKAFUMI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “NIWA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS10068763B2Sep 4, 2018
Coating film forming method, coating film forming apparatus, and storage medium
TOKYO ELECTRON LTD8 citations82
US10672606B2Jun 2, 2020
Coating film forming method, coating film forming apparatus, and storage medium
TOKYO ELECTRON LTD5 citations71
US12404587B2Sep 2, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations60
US9972512B2May 15, 2018
Liquid processing method, memory medium and liquid processing apparatus
TOKYO ELECTRON LTD0 citations48
US9786488B2Oct 10, 2017
Liquid processing method, memory medium and liquid processing apparatus
TOKYO ELECTRON LTD0 citations48
US10642168B2May 5, 2020
Auxiliary exposure apparatus and exposure amount distribution acquisition method
TOKYO ELECTRON LTD0 citations40
US8367308B2Feb 5, 2013
Substrate processing method
TOKYO ELECTRON LTD0 citations37