Inventor

GOTTSCHO RICHARD ALAN

US13 patents

⚠️ This page may combine multiple inventors who share the name “GOTTSCHO RICHARD ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

11 patents

US9972478B2May 15, 2018

Method and process of implementing machine learning in complex multivariate wafer processing equipment

LAM RES CORP23 citations94

US10041868B2Aug 7, 2018

Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber

LAM RES CORP21 citations93

US9966231B2May 8, 2018

Direct current pulsing plasma systems

LAM RES CORP25 citations91

US12278125B2Apr 15, 2025

Integrated dry processes for patterning radiation photoresist patterning

LAM RES CORP8 citations85

US11276564B2Mar 15, 2022

Plasma processing system having an inspection tool and controller that interfaces with a tool model

LAM RES CORP12 citations85

US12183604B2Dec 31, 2024

Integrated dry processes for patterning radiation photoresist patterning

LAM RES CORP9 citations84

US10615009B2Apr 7, 2020

System implementing machine learning in complex multivariate wafer processing equipment

LAM RES CORP10 citations84

US10269545B2Apr 23, 2019

Methods for monitoring plasma processing systems for advanced process and tool control

LAM RES CORP10 citations83

US7152011B2Dec 19, 2006

Smart component-based management techniques in a substrate processing system

LAM RES CORP9 citations73

US10697874B2Jun 30, 2020

Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber

LAM RES CORP0 citations51

US7254510B2Aug 7, 2007

Smart component-based management techniques in a substrate processing system

LAM RES CORP0 citations51

LUCENT TECHNOLOGIES INC

2 patents

US5847690ADec 8, 1998

Integrated liquid crystal display and digitizer having a black matrix layer adapted for sensing screen touch location

LUCENT TECHNOLOGIES INC231 citations96

US5976637ANov 2, 1999

Method for coating heterogeneous substrates with homogeneous layers

LUCENT TECHNOLOGIES INC3 citations60