Inventor
RHEE HAN SAEM
KR3 patents
Patents
3 patentsUS10109459B1Oct 23, 2018
Substrate treating apparatus, substrate treating method, and plasma generating unit
PSK INC7 citations81
US10312060B2Jun 4, 2019
Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same
PSK INC0 citations39
US9536708B2Jan 3, 2017
Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device
PSK INC0 citations39