Inventor
LEEM CHOONSHIK
KR6 patents
⚠️ This page may combine multiple inventors who share the name “LEEM CHOONSHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS9612212B1Apr 4, 2017
Ellipsometer and method of inspecting pattern asymmetry using the same
SAMSUNG ELECTRONICS CO LTD5 citations80
US9719946B2Aug 1, 2017
Ellipsometer and method of inspecting pattern asymmetry using the same
SAMSUNG ELECTRONICS CO LTD2 citations69
US10949949B2Mar 16, 2021
Non-transitory computer-readable medium and method for monitoring a semiconductor fabrication process
SAMSUNG ELECTRONICS CO LTD1 citations54
US10373882B2Aug 6, 2019
Method and system of measuring semiconductor device and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations43
US9360308B2Jun 7, 2016
Methods for measuring a thickness of an object
SAMSUNG ELECTRONICS CO LTD0 citations41