P

Inventor

VOLKSEN WILLI

US79 patents
⚠️ This page may combine multiple inventors who share the name “VOLKSEN WILLI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

32 patents
US7056840B2Jun 6, 2006

Direct photo-patterning of nanoporous organosilicates, and method of use

IBM153 citations99
US6107357AAug 22, 2000

Dielectric compositions and method for their manufacture

IBM124 citations98
US6093636AJul 25, 2000

Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets

IBM158 citations98
US6541865B2Apr 1, 2003

Porous dielectric material and electronic devices fabricated therewith

IBM42 citations96
US6342454B1Jan 29, 2002

Electronic devices with dielectric compositions and method for their manufacture

IBM67 citations96
US6685983B2Feb 3, 2004

Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens

IBM27 citations92
US6670285B2Dec 30, 2003

Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials

IBM41 citations92
US6143643ANov 7, 2000

Process for manufacture of integrated circuit device using organosilicate insulative matrices

IBM21 citations92
US5310625AMay 10, 1994

Process for forming negative tone images of polyimides using base treatment of crosslinked polyamic ester

IBM24 citations92
US6177360B1Jan 23, 2001

Process for manufacture of integrated circuit device

IBM39 citations91
US7229934B2Jun 12, 2007

Porous organosilicates with improved mechanical properties

IBM21 citations90
US5953627ASep 14, 1999

Process for manufacture of integrated circuit device

IBM40 citations90
US6333141B1Dec 25, 2001

Process for manufacture of integrated circuit device using inorganic/organic matrix comprising polymers of three dimensional architecture

IBM18 citations83
US7459183B2Dec 2, 2008

Method of forming low-K interlevel dielectric layers and structures

IBM7 citations74
US7341788B2Mar 11, 2008

Materials having predefined morphologies and methods of formation thereof

IBM8 citations73
US7087982B2Aug 8, 2006

Nitrogen-containing polymers as porogens in the preparation of highly porous, low dielectric constant materials

IBM10 citations73
US6812551B2Nov 2, 2004

Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens

IBM5 citations73
US6660640B1Dec 9, 2003

Process for planarizing patterned metal structures for magnetic thin film heads

IBM6 citations73
US9214335B2Dec 15, 2015

Surface plasma modification of porous thin-films to optimize pore filling

IBM6 citations72
US9058983B2Jun 16, 2015

In-situ hardmask generation

IBM6 citations72
US5866627AFeb 2, 1999

Photosensitive polyimide precursors

IBM10 citations72
US4954578ASep 4, 1990

Fine domain composite films of polyimide mixtures

IBM6 citations72
US4818812AApr 4, 1989

Sealant for integrated circuit modules, polyester suitable therefor and preparation of polyester

IBM9 citations72
US4467000AAug 21, 1984

Process for coating a substrate with polyimide

IBM15 citations72
US5446074AAug 29, 1995

Photosensitive polyimide precursors

IBM10 citations71
US5302851AApr 12, 1994

Circuit assembly with polyimide insulator

IBM9 citations71
US9766170B2Sep 19, 2017

Determination of young'S modulus of porous thin films using ultra-low load nano-indentation

IBM3 citations69
US4849501AJul 18, 1989

Polyimide coating compositions based on meta-dialkyldihydrogen pyromellitate and aromatic diamines

IBM6 citations69
US4612210ASep 16, 1986

Process for planarizing a substrate

IBM9 citations69
US11371143B2Jun 28, 2022

Implementing the post-porosity plasma protection (P4) process using I-CVD

IBM0 citations62
US11168234B2Nov 9, 2021

Enhanced adhesive materials and processes for 3D applications

IBM0 citations62
US7368483B2May 6, 2008

Porous composition of matter, and method of making same

IBM5 citations62

CALIFORNIA INST OF TECHN

5 patents

HITACHI GLOBAL STORAGE NETHERL

3 patents

ARNOLD JOHN C

2 patents

DUBOIS GERAUD JEAN-MICHEL

2 patents

LABADIE JEFFREY W

1 patent

BRUCE ROBERT L

1 patent

PURUSHOTHAMAN SAMPATH

1 patent

HEDRICK JAMES L

1 patent

CHA JENNIFER NAM

1 patent

HITACHI GLOBAL STORAGE TECH

1 patent

Showing the top 50 of 79 patents by PatentIndex Score.