Inventor
SEKIMOTO EIICHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SEKIMOTO EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6185370B1Feb 6, 2001
Heating apparatus for heating an object to be processed
TOKYO ELECTRON LTD44 citations91
US6573031B2Jun 3, 2003
Apparatus and method of thermal processing and method of pattern formation
TOKYO ELECTRON LTD24 citations88
US6659661B2Dec 9, 2003
Substrate processing apparatus
TOKYO ELECTRON LTD18 citations83
US7868270B2Jan 11, 2011
Temperature control for performing heat process in coating/developing system for resist film
TOKYO ELECTRON LTD7 citations82
US11612017B2Mar 21, 2023
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD2 citations71
US7755003B2Jul 13, 2010
Temperature control for performing heat process on resist film
TOKYO ELECTRON LTD5 citations61
US7517217B2Apr 14, 2009
Method and apparatus for heat processing of substrate
TOKYO ELECTRON LTD2 citations61
US11476136B2Oct 18, 2022
Substrate processing apparatus and method of adjusting substrate processing apparatus
TOKYO ELECTRON LTD0 citations57
US6969538B2Nov 29, 2005
Method for heat processing of substrate
TOKYO ELECTRON LTD1 citations50
US12525906B2Jan 13, 2026
Motor control method, transfer device, and storing medium
TOKYO ELECTRON LTD0 citations47
US10504757B2Dec 10, 2019
Substrate processing apparatus and method of adjusting substrate processing apparatus
TOKYO ELECTRON LTD0 citations47
US11087983B2Aug 10, 2021
Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium
TOKYO ELECTRON LTD0 citations41