Inventor
KO Allen
US6 patents
⚠️ This page may combine multiple inventors who share the name “KO Allen”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS10276353B2Apr 30, 2019
Dual-channel showerhead for formation of film stacks
APPLIED MATERIALS INC4 citations71
US10246772B2Apr 2, 2019
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
APPLIED MATERIALS INC5 citations70
US11365476B2Jun 21, 2022
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices
APPLIED MATERIALS INC1 citations59