Inventor

GORELIK DMITRY

IL3 patents

⚠️ This page may combine multiple inventors who share the name “GORELIK DMITRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US11118903B2Sep 14, 2021

Efficient illumination shaping for scatterometry overlay

KLA TENCOR CORP9 citations82

US10976562B2Apr 13, 2021

Nano-structured non-polarizing beamsplitter

KLA TENCOR CORP0 citations50

KLA CORP

1 patent

US11531275B1Dec 20, 2022

Parallel scatterometry overlay metrology

KLA CORP9 citations83