Inventor
Hu Weize
US4 patents
Patents
4 patentsUS12368024B2Jul 22, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC2 citations71
US11586160B2Feb 21, 2023
Reducing substrate surface scratching using machine learning
APPLIED MATERIALS INC2 citations68
US11835927B2Dec 5, 2023
Reducing substrate surface scratching using machine learning
APPLIED MATERIALS INC0 citations58
US11718912B2Aug 8, 2023
Methods and apparatus for calibrating concentration sensors for precursor delivery
APPLIED MATERIALS INC0 citations36