Inventor
KOMEYAMA YOSHIHIRO
JP6 patents
Patents
6 patentsUS4825453AApr 25, 1989
X-ray exposure apparatus
HITACHI LTD59 citations96
US4492356AJan 8, 1985
Precision parallel translation system
HITACHI LTD99 citations95
US4777641AOct 11, 1988
Method and apparatus for alignment
HITACHI LTD27 citations92
US4614431ASep 30, 1986
Alignment apparatus with optical length-varying optical system
HITACHI LTD52 citations90
US4516254AMay 7, 1985
X-Ray lithographic apparatus
HITACHI LTD13 citations72
US4708484ANov 24, 1987
Projection alignment method and apparatus
HITACHI LTD8 citations71