Inventor
TANIGUCHI MOTOYA
JP8 patents
Patents
8 patentsUS4803712AFeb 7, 1989
X-ray exposure system
HITACHI LTD73 citations96
US4666291AMay 19, 1987
Light-exposure apparatus
HITACHI LTD57 citations96
US4475223AOct 2, 1984
Exposure process and system
HITACHI LTD141 citations96
US4492356AJan 8, 1985
Precision parallel translation system
HITACHI LTD99 citations95
US5121449AJun 9, 1992
Information detecting system of scanning type
HITACHI LTD25 citations92
US4852133AJul 25, 1989
X-ray lithography apparatus
HITACHI LTD38 citations92
US4403336ASep 6, 1983
X-Ray exposure apparatus
HITACHI LTD17 citations73
US4516254AMay 7, 1985
X-Ray lithographic apparatus
HITACHI LTD13 citations72