Inventor
SUGIYAMA SHUJI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SUGIYAMA SHUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS6509564B1Jan 21, 2003
Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method
HITACHI LTD39 citations92
US4477182AOct 16, 1984
Pattern exposing apparatus
HITACHI LTD29 citations92
US4690529ASep 1, 1987
Optical exposer
HITACHI LTD29 citations88
US6768113B2Jul 27, 2004
Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method
HITACHI LTD7 citations74
US4941745AJul 17, 1990
Projection aligner for fabricating semiconductor device having projection optics
HITACHI LTD8 citations72
US4615614AOct 7, 1986
Optical exposure apparatus
HITACHI LTD8 citations72
US5164789ANov 17, 1992
Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference
HITACHI LTD5 citations61
US5214493AMay 25, 1993
Reduction exposure apparatus with correction for alignment light having inhomogeneous intensity distribution
HITACHI LTD6 citations59