Inventor

STAUF GREGORY

US4 patents

Patents

4 patents

US5711816AJan 27, 1998

Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same

ADVANCED TECH MATERIALS316 citations98

US5705443AJan 6, 1998

Etching method for refractory materials

ADVANCED TECH MATERIALS208 citations98

US5536323AJul 16, 1996

Apparatus for flash vaporization delivery of reagents

ADVANCED TECH MATERIALS286 citations97

US5948322ASep 7, 1999

Source reagents for MOCVD formation of non-linear optically active metal borate films and optically active metal borate films formed therefrom

ADVANCED TECH MATERIALS32 citations89