Inventor
PERGANDE PAUL E
US20 patents
⚠️ This page may combine multiple inventors who share the name “PERGANDE PAUL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
8 patentsUS9995631B2Jun 12, 2018
System and method to monitor semiconductor workpiece temperature using thermal imaging
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations66
US10600662B2Mar 24, 2020
Silicon carbide substrate heating
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations62
US9412638B2Aug 9, 2016
End effector pads
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations60
US9728430B2Aug 8, 2017
Electrostatic chuck with LED heating
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations52
US10903096B2Jan 26, 2021
System and apparatus for process chamber window cooling
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10669430B2Jun 2, 2020
Anti-reflective coating for transparent end effectors
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US9415519B2Aug 16, 2016
Composite end effector and method of making a composite end effector
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations49
US9862101B2Jan 9, 2018
Self-damping end effector
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations42
APPLIED MATERIALS INC
7 patentsUS10103046B2Oct 16, 2018
Buffer chamber wafer heating mechanism and supporting robot
APPLIED MATERIALS INC6 citations83
US11315806B2Apr 26, 2022
Batch heating and cooling chamber or loadlock
APPLIED MATERIALS INC2 citations72
US11415463B2Aug 16, 2022
Contactless workpiece temperature sensor
APPLIED MATERIALS INC0 citations62
US11264258B2Mar 1, 2022
Buffer chamber wafer heating mechanism and supporting robots
APPLIED MATERIALS INC0 citations62
US11109452B2Aug 31, 2021
Modular LED heater
APPLIED MATERIALS INC0 citations62
US10283379B2May 7, 2019
Batch LED heating and cooling chamber or loadlock
APPLIED MATERIALS INC1 citations62
US10699930B2Jun 30, 2020
Buffer chamber wafer heating mechanism and supporting robots
APPLIED MATERIALS INC0 citations51