Inventor

CARLSON CHARLES T

US54 patents

⚠️ This page may combine multiple inventors who share the name “CARLSON CHARLES T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARLSON CHARLES T

APPLIED MATERIALS INC

Robot for simultaneous substrate transfer

Annealing system and method

Robot for simultaneous substrate transfer

High pressure steam anneal processing apparatus

Resonator, linear accelerator configuration and ion implantation system having rotating exciter

Resonator, linear accelerator configuration and ion implantation system having toroidal resonator

Robot for simultaneous substrate transfer

High-density substrate processing systems and methods

System, apparatus and method for variable length electrode in linear accelerator

Robot for simultaneous substrate transfer

Robot for simultaneous substrate transfer

Resonator coil having an asymmetrical profile

Method and device for a carrier proximity mask

Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber

Resonator, linear accelerator configuration and ion implantation system having rotating exciter

Linear accelerator coil including multiple fluid channels

Robot for simultaneous substrate transfer

Stiffened RF LINAC coil inductor with internal support structure

Drift tube, apparatus and ion implanter having variable focus electrode in linear accelerator

Resonator coil having an asymmetrical profile

Modular linear accelerator assembly

Linear accelerator assembly including flexible high-voltage connection

Robot for simultaneous substrate transfer

High-density substrate processing systems and methods

Linear accelerator assembly including flexible high-voltage connection

Dual port remote plasma clean isolation valve

Workpiece handling architecture for high workpiece throughput

Method and device for a carrier proximity mask

Substrate transfer structure

Method and device for a carrier proximity mask

Low particle protected flapper valve

Method of assembling drift tube assemblies in ion implantors

Three layer resonator coil for linear accelerator

Isolation valve

Workpiece handling architecture for high workpiece throughput

VARIAN SEMICONDUCTOR EQUIPMENT

System and method for 2D workpiece alignment

Wafer handling apparatus

Multi-part mask for implanting workpieces

Optimization of conveyor belts used for workpiece processing

Workpiece alignment device

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Workpiece handling system and methods of workpiece handling

Mechanical alignment of substrates to a mask

End effector pads

Shielding device for substrate edge protection and method of using same

High-throughput ion implanter

RIORDON BENJAMIN B

Stepped masking for patterned implantation

Stepped masking for patterned implantation

WEAVER WILLIAM T

System and method for handling multiple workpieces for matrix configuration processing

VOPAT ROBERT B

Implant mask with moveable hinged mask segments

CARLSON CHARLES T

Masking apparatus for an ion implanter