Inventor
MUROI YUKIO
JP2 patents
Patents
2 patentsUS6428619B1Aug 6, 2002
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
MITSUBISHI MATERIAL SILICON16 citations81
US6682597B2Jan 27, 2004
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
MITSUBISHI MATERIAL SILICON7 citations70