Inventor
SHIOTA TAKAAKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SHIOTA TAKAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
4 patentsUS7632349B2Dec 15, 2009
Silicon wafer surface defect evaluation method
SUMCO CORP8 citations81
US7582540B2Sep 1, 2009
Method for manufacturing SOI wafer
SUMCO CORP2 citations59
US7615467B2Nov 10, 2009
Method for manufacturing SOI wafer
SUMCO CORP1 citations49
US7960253B2Jun 14, 2011
Thin silicon wafer with high gettering ability and production method thereof
SUMCO CORP0 citations46
MITSUBISHI MATERIAL SILICON
3 patentsUS6663708B1Dec 16, 2003
Silicon wafer, and manufacturing method and heat treatment method of the same
MITSUBISHI MATERIAL SILICON42 citations91
US6428619B1Aug 6, 2002
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
MITSUBISHI MATERIAL SILICON16 citations81
US6682597B2Jan 27, 2004
Silicon wafer, and heat treatment method of the same and the heat-treated silicon wafer
MITSUBISHI MATERIAL SILICON7 citations70