Inventor
BRORS DANIEL L
US17 patents
⚠️ This page may combine multiple inventors who share the name “BRORS DANIEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TORREX EQUIPMENT CORP
8 patentsUS6321680B2Nov 27, 2001
Vertical plasma enhanced process apparatus and method
TORREX EQUIPMENT CORP526 citations98
US5551985ASep 3, 1996
Method and apparatus for cold wall chemical vapor deposition
TORREX EQUIPMENT CORP135 citations98
US6352593B1Mar 5, 2002
Mini-batch process chamber
TORREX EQUIPMENT CORP118 citations97
US6506691B2Jan 14, 2003
High rate silicon nitride deposition method at low pressures
TORREX EQUIPMENT CORP22 citations92
US6287635B1Sep 11, 2001
High rate silicon deposition method at low pressures
TORREX EQUIPMENT CORP30 citations92
USRE36957ENov 21, 2000
Method and apparatus for cold wall chemical vapor deposition
TORREX EQUIPMENT CORP28 citations92
US5291030AMar 1, 1994
Optoelectronic detector for chemical reactions
TORREX EQUIPMENT CORP24 citations92
US6235652B1May 22, 2001
High rate silicon dioxide deposition at low pressures
TORREX EQUIPMENT CORP7 citations73
GENUS INC
4 patentsUS4851295AJul 25, 1989
Low resistivity tungsten silicon composite film
GENUS INC59 citations96
US4629635ADec 16, 1986
Process for depositing a low resistivity tungsten silicon composite film on a substrate
GENUS INC90 citations96
US4565157AJan 21, 1986
Method and apparatus for deposition of tungsten silicides
GENUS INC110 citations94
US4920908AMay 1, 1990
Method and apparatus for deposition of tungsten silicides
GENUS INC13 citations72