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Inventor
OKADA SHIGEFUMI
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “OKADA SHIGEFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DISCO CORP
3 patents
US9390958B2
Jul 12, 2016
Transfer unit including suction openings configured to receive suction pads or seal members therein
DISCO CORP
3 citations
69
US11456260B2
Sep 27, 2022
Wafer processing method
DISCO CORP
0 citations
48
US9034735B2
May 19, 2015
Laser processing method for workpiece
DISCO CORP
0 citations
33
INDYK RICHARD F
1 patent
US8652941B2
Feb 18, 2014
Wafer dicing employing edge region underfill removal
INDYK RICHARD F
10 citations
77
IBM
1 patent
US10211175B2
Feb 19, 2019
Stress-resilient chip structure and dicing process
IBM
0 citations
39