Inventor
MORINAGA HIROYUKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MORINAGA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
7 patentsUS7260443B2Aug 21, 2007
System and program for making recipe and method for manufacturing products by using recipe
TOSHIBA KK19 citations82
US7512501B2Mar 31, 2009
Defect inspecting apparatus for semiconductor wafer
TOSHIBA KK7 citations71
US6721935B2Apr 13, 2004
Coordinate transformation system for semiconductor device, coordinate transformation method and coordinate transformation program
TOSHIBA KK11 citations71
US7239934B2Jul 3, 2007
System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device
TOSHIBA KK5 citations59
US9165091B2Oct 20, 2015
Recipe management apparatus and recipe management method
TOSHIBA KK2 citations54
US8364437B2Jan 29, 2013
Mark arrangement inspecting method, mask data, and manufacturing method of semiconductor device
TOSHIBA KK1 citations47
US7847270B2Dec 7, 2010
Semiconductor manufacturing apparatus and method thereof
TOSHIBA KK0 citations39