Inventor
ITO TAKEMA
JP4 patents
Patents
4 patentsUS7260443B2Aug 21, 2007
System and program for making recipe and method for manufacturing products by using recipe
TOSHIBA KK19 citations82
US7512501B2Mar 31, 2009
Defect inspecting apparatus for semiconductor wafer
TOSHIBA KK7 citations71
US7239934B2Jul 3, 2007
System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device
TOSHIBA KK5 citations59
US7847270B2Dec 7, 2010
Semiconductor manufacturing apparatus and method thereof
TOSHIBA KK0 citations39