Inventor
SIDAWAY HOWARD A
US2 patents
Patents
2 patentsUS7608382B2Oct 27, 2009
Method of controlling the differential dissolution rate of photoresist compositions, polycyclic olefin polymers and monomers used for making such polymers
PROMERUS LLC1 citations49
US7341816B2Mar 11, 2008
Method of controlling the differential dissolution rate of photoresist compositions, polycyclic olefin polymers and monomers used for making such polymers
PROMERUS LLC0 citations49