Inventor
FANG ZHIYUAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “FANG ZHIYUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
5 patentsUS7381644B1Jun 3, 2008
Pulsed PECVD method for modulating hydrogen content in hard mask
NOVELLUS SYSTEMS INC555 citations99
US7981810B1Jul 19, 2011
Methods of depositing highly selective transparent ashable hardmask films
NOVELLUS SYSTEMS INC54 citations98
US7915166B1Mar 29, 2011
Diffusion barrier and etch stop films
NOVELLUS SYSTEMS INC70 citations96
US7981777B1Jul 19, 2011
Methods of depositing stable and hermetic ashable hardmask films
NOVELLUS SYSTEMS INC42 citations92
US9240320B1Jan 19, 2016
Methods of depositing smooth and conformal ashable hard mask films
NOVELLUS SYSTEMS INC15 citations82