Inventor

APEN ELIZABETH

US4 patents

⚠️ This page may combine multiple inventors who share the name “APEN ELIZABETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US7915166B1Mar 29, 2011

Diffusion barrier and etch stop films

NOVELLUS SYSTEMS INC70 citations96

YU YONGSIK

1 patent

US8669181B1Mar 11, 2014

Diffusion barrier and etch stop films

YU YONGSIK36 citations92

WU HUI-JUNG

1 patent

US8124522B1Feb 28, 2012

Reducing UV and dielectric diffusion barrier interaction through the modulation of optical properties

WU HUI-JUNG31 citations87

MOTOROLA INC

1 patent

US6146541ANov 14, 2000

Method of manufacturing a semiconductor device that uses a calibration standard

MOTOROLA INC14 citations66