Inventor

LABRIE AARON

US6 patents

⚠️ This page may combine multiple inventors who share the name “LABRIE AARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US9685353B2Jun 20, 2017

Apparatus and method for edge bevel removal of copper from silicon wafers

NOVELLUS SYSTEMS INC8 citations83

US10563298B1Feb 18, 2020

Wafer chuck with aerodynamic design for turbulence reduction

NOVELLUS SYSTEMS INC0 citations48

SEH AMERICA INC

1 patent

US6030451AFeb 29, 2000

Two camera diameter control system with diameter tracking for silicon ingot growth

SEH AMERICA INC23 citations91

FENG JINGBIN

1 patent

US8172646B2May 8, 2012

Magnetically actuated chuck for edge bevel removal

FENG JINGBIN16 citations82

GANESAN KOUSIK

1 patent

US8419964B2Apr 16, 2013

Apparatus and method for edge bevel removal of copper from silicon wafers

GANESAN KOUSIK11 citations78

STEPHENS CRAIG P

1 patent

US9732416B1Aug 15, 2017

Wafer chuck with aerodynamic design for turbulence reduction

STEPHENS CRAIG P13 citations76