Inventor
TANG SHOUHONG
US24 patents
⚠️ This page may combine multiple inventors who share the name “TANG SHOUHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
11 patentsUS10352691B1Jul 16, 2019
Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool
KLA TENCOR CORP10 citations83
US7847954B2Dec 7, 2010
Measuring the shape and thickness variation of a wafer with high slopes
KLA TENCOR CORP13 citations82
US9702829B1Jul 11, 2017
Systems and methods for wafer surface feature detection and quantification
KLA TENCOR CORP12 citations80
US9121684B2Sep 1, 2015
Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes
KLA TENCOR CORP16 citations79
US7583386B2Sep 1, 2009
Method and apparatus for optically analyzing a surface
KLA TENCOR CORP5 citations73
US9074873B1Jul 7, 2015
Measurement of thickness variation and shape of wafers
KLA TENCOR CORP2 citations62
US7667852B2Feb 23, 2010
Measuring the shape, thickness variation, and material inhomogeneity of a wafer
KLA TENCOR CORP3 citations62
US7595891B2Sep 29, 2009
Measurement of the top surface of an object with/without transparent thin films in white light interferometry
KLA TENCOR CORP2 citations62
US7538887B1May 26, 2009
Temporal interferometric signal modeling with constant phase shift in white light interferometry
KLA TENCOR CORP6 citations62
US9163928B2Oct 20, 2015
Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer
KLA TENCOR CORP3 citations57
US9903708B2Feb 27, 2018
Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate
KLA TENCOR CORP0 citations46
PHASE SHIFT TECHNOLOGY INC
4 patentsUS6847458B2Jan 25, 2005
Method and apparatus for measuring the shape and thickness variation of polished opaque plates
PHASE SHIFT TECHNOLOGY INC81 citations96
US5471307ANov 28, 1995
Sheet flatness measurement system and method
PHASE SHIFT TECHNOLOGY INC50 citations90
US6856405B2Feb 15, 2005
Non linear phase shift calibration for interferometric measurement of multiple surfaces
PHASE SHIFT TECHNOLOGY INC8 citations73
US6885461B2Apr 26, 2005
Weighted least-square interferometric measurement of multiple surfaces
PHASE SHIFT TECHNOLOGY INC4 citations62
TANG SHOUHONG
3 patentsUS8537369B1Sep 17, 2013
Method and apparatus for measuring the shape and thickness variation of a wafer by two single-shot phase-shifting interferometers
TANG SHOUHONG7 citations82
US8068234B2Nov 29, 2011
Method and apparatus for measuring shape or thickness information of a substrate
TANG SHOUHONG15 citations82
US9019491B2Apr 28, 2015
Method and apparatus for measuring shape and thickness variation of a wafer
TANG SHOUHONG0 citations40