Inventor

YUE HONGYU H

US3 patents

⚠️ This page may combine multiple inventors who share the name “YUE HONGYU H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEL EPION INC

2 patents

US9502209B2Nov 22, 2016

Multi-step location specific process for substrate edge profile correction for GCIB system

TEL EPION INC1 citations47

US9105443B2Aug 11, 2015

Multi-step location specific process for substrate edge profile correction for GCIB system

TEL EPION INC0 citations47

YUE HONGYU H

1 patent

US8444848B2May 21, 2013

Electrochemical substrate slicing using electromagnetic wave excitation

YUE HONGYU H0 citations31