Inventor
GIZZO VINCENT
US3 patents
Patents
3 patentsUS9875947B2Jan 23, 2018
Method of surface profile correction using gas cluster ion beam
TEL EPION INC1 citations49
US9502209B2Nov 22, 2016
Multi-step location specific process for substrate edge profile correction for GCIB system
TEL EPION INC1 citations47
US9105443B2Aug 11, 2015
Multi-step location specific process for substrate edge profile correction for GCIB system
TEL EPION INC0 citations47